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National Repository of Grey Literature 3 records found  Search took 0.01 seconds. 
Study of asymmetric blazed gratings created by electron beam lithography
 Brunn, Ondřej ; Urbánek,, Michal (referee) ; Krátký, Stanislav (advisor)
This work deals with fabrication of asymmetric blazed gratings by electron beam lithography. It describes the whole process of structures preparing in software, followed by exposure carried out by an electron beam writer, and it finishes by creating and analysing both qualitative and quantitative characteristics of the fabricated gratings. These results are then compared with analytic calculation and numeric simulation.
Detailed record
Study of asymmetric blazed gratings created by electron beam lithography
 Brunn, Ondřej ; Urbánek,, Michal (referee) ; Krátký, Stanislav (advisor)
This work deals with fabrication of asymmetric blazed gratings by electron beam lithography. It describes the whole process of structures preparing in software, followed by exposure carried out by an electron beam writer, and it finishes by creating and analysing both qualitative and quantitative characteristics of the fabricated gratings. These results are then compared with analytic calculation and numeric simulation.
Detailed record
Study of asymmetric blazed gratings created by electron beam lithography
 Brunn, Ondřej ; Urbánek,, Michal (referee) ; Krátký, Stanislav (advisor)
This work deals with fabrication of asymmetric blazed gratings by electron beam lithography. It describes the whole process of structures preparing in software, followed by exposure carried out by an electron beam writer, and it finishes by creating and analysing both qualitative and quantitative characteristics of the fabricated gratings. These results are then compared with analytic calculation and numeric simulation.
Detailed record

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